发明名称 |
SEMICONDUCTOR CHIP, DEFINITION METHOD AND DESIGN METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for defining a dynamic array section to be manufactured on a semiconductor chip.SOLUTION: A method comprises: defining a peripheral boundary of the dynamic array section 3101; defining a manufacturing assurance halo outside the boundary of the dynamic array section 3103; and controlling chip layout features within the manufacturing assurance halo to ensure that manufacturing of conductive features inside the boundary of the dynamic array section is not adversely affected by the chip layout features within the manufacturing assurance halo 3105. |
申请公布号 |
JP2015149491(A) |
申请公布日期 |
2015.08.20 |
申请号 |
JP20150059324 |
申请日期 |
2015.03.23 |
申请人 |
TELA INNOVATIONS INC |
发明人 |
SCOTT T BECKER;SMALLING MICHAEL C |
分类号 |
H01L21/82 |
主分类号 |
H01L21/82 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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