TEMPERATURE MEASUREMENT METHOD AND PLASMA TREATMENT SYSTEM

摘要

PROBLEM TO BE SOLVED: To enable high-precision measurement of the temperature of a measurement target member disposed in a plasma treatment device through a measurement window.SOLUTION: A temperature measurement method for a measurement target member disposed in a chamber of a plasma treatment apparatus includes the steps of: acquiring a function f for correcting a correction target temperature Taccording to a temperature Tof a measurement window which is calculated from the correction target temperature Tas a temperature of the measurement target member measured through the measurement window secured to the chamber, a reference temperature Tas the temperature of the measurement target member measured not through the measurement window, and the measured temperature Tof the measurement window; measuring the correction target temperature T; measuring the temperature Tof the measurement window; and correcting the correction target temperature Taccording to the measured temperature Tof the measurement window on the basis of the acquired function f.