CMP PAD CONDITIONER HAVING DOT SECTIONS AND MANUFACTURING METHOD THEREOF

摘要

The present invention relates to a CMP pad conditioner having dot sections and a manufacturing method thereof and, more specifically, relates to a CMP pad conditioner comprising: a substrate including one or more flat surfaces; one or more dot sections formed on the flat surfaces; and a plurality of abrasive particles formed on the surfaces of the dot sections, wherein the dot sections are constituted by a protruding spherical surface having a predetermined radius of curvature (R), thereby achieving a small amount of pad to be cut per hour and maintaining high surface roughness, and a manufacturing method thereof.