| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical probe, a fitting cover and a shape measurement apparatus capable of suppressing occurrence of abnormal values of light reception quantity distribution caused by secondary reflectance, even with comparatively high reflective index on a surface of a measurement target.SOLUTION: An optical probe 40 includes a probe cover 45 incorporating an optical system having an irradiation optical system and a light-receiving optical system. At a lower face 45a of the probe cover 45 being a facing area that faces a work-piece W, there are arranged an emission area 43 that transmits light and an input area 44. The lower face 45a is a surface configured to reflect, in light of reflectance from the work-piece W, the light along a direction of specular reflection into a direction away from the incident area 44, from an irradiation position R to the work-piece W of light emitted from the emission area 43. Accordingly, an incident light volume of secondary reflectance to the incident area 44 can be suppressed, so that abnormal values of light reception quantity distribution due to the secondary reflectance can be suppressed. |
