发明名称 METHOD FOR CUTTING WORKPIECE
摘要 PROBLEM TO BE SOLVED: To provide a method for cutting a workpiece which prevents wear of a resin film and disconnection of a resin-coated saw wire during the cutting, and can reduce both an arithmetic average roughness Ra and waviness of the cut workpiece.SOLUTION: In a method for running a resin-coated saw wire 4 in which the surface of a steel wire is coated with a resin film and thereby cutting a workpiece 2 excluding silicon, at least one of the resin-coated saw wire 4 and the workpiece 2 is swung, diamond abrasive grains having an average particle size of more than 0 μm and 8 μm or less are sprayed to the resin-coated saw wire 4, and a linear velocity of the resin-coated saw wire 4 is set at 800 m/min or more.
申请公布号 JP2015147293(A) 申请公布日期 2015.08.20
申请号 JP20150002678 申请日期 2015.01.08
申请人 KOBELCO KAKEN:KK 发明人 YOSHIKAWA KAZUO;ANAMI TADANORI;URAZUKA AKINORI;MATSUSHIMA YOSHITAKE
分类号 B24B27/06;B28D5/04;H01L21/304 主分类号 B24B27/06
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