| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow coating device capable of retaining a sufficient coating quality without raising a coating cost sharply.SOLUTION: A flow coating device comprises a housing 5, a plurality of check valves 7, a supply pipe 9 and a pump 11. The housing 5 is formed therein with a storage chamber 5a capable of storing a process liquid. The housing 5 has a plurality of mounting holes 5b formed therethrough while being arranged therethrough in horizontal directions. The total of the flow passage areas of individual outlet ports 7a is made smaller than the minimum flow passage area in the storage chamber 5a. |
