F-THETA LENS AND LASER PROCESSING DEVICE FOR FAR-INFRARED LASER PROCESSING

摘要

An F¸ lens and a laser processing device for far-infrared laser processing are provided. The F¸ lens for far-infrared laser processing comprises a first lens (L1), a second lens (L2) and a third lens (L3) which are coaxially arranged successively along a transmission direction of incident light beams, wherein the first lens is a negative meniscus lens, and the second lens and the third lens are positive meniscus lenses; and all the middle parts of the first lens, the second lens and the third lens protrude towards the transmission direction of incident light beams. The F¸ lens can improve the imaging quality and the resolution distance, effectively calibrate the astigmatism and distortion of the lens, reduce the influence of high-order aberrations, and has a high degree of energy concentration of laser focus points and high processing accuracy, thereby meeting the requirements for cutting or drilling. The F¸ lens is miniaturized, so that the volume of the lens is effectively controlled, and costs are reduced.