| 摘要 |
<p>The invention relates to a sensor module on a micromechanical basis having at least one moveable structure, at least one active primary transducer for converting a mechanical signal of the moveable structure into an electrical signal, and an electronic circuit for capturing, using measurement technology, movements of the moveable structure, wherein the sensor module has, in addition to the active primary transducer, at least one passive secondary transducer for converting a mechanical signal of the moveable structure into an electrical signal, wherein the primary transducer and the secondary transducer are coupled to the electronic circuit, and wherein the secondary transducer is provided as a wake-up generator for the primary transducer and/or the electronic circuit from a rest state into a measurement state. It is therefore the object of the present invention to propose an integrated sensor module on a micromechanical basis having a high measurement accuracy, which has, in continuous use, a low energy consumption and which also detects with a high level of accuracy sporadically occurring accelerations of the moveable structure in the sensor module using measurement technology. The object is achieved by a sensor module of the generic type defined in the beginning, in which the secondary transducer is integrated in the moved structure and/or a further moveable structure is integrated in the electronic circuit.</p> |
