| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus in which, even if an examination target becomes large, film thickness non-uniformity can be examined on the basis of image information which is obtained under the same imaging condition, and even a delicate film thickness non-uniformity can also be examined with high precision. <P>SOLUTION: In the film thickness non-uniformity examination apparatus, at least a part of a coating formation surface of an examination target 10 with which coating is formed on its surface is imaged and on the basis of the obtained image information, film thickness non-uniformity in the coating on the examination target is examined. The film thickness non-uniformity examination apparatus comprises a moving section 2 which moves at least either the examination target or an imaging section 4, an image registration section in which images within a predetermined range which is captured by the imaging section during movement are registered while adding movement position information thereto for each movement position, an image combination section which arranges the images within the predetermined range with the move position information added thereto in the order of move positions and combined as a whole image, and a color non-uniformity detection section which detects color non-uniformity of the examination target on the basis of image information of the combined whole image. The predetermined range of images captured by the imaging section is a range which is observed at the same angle to the imaging section. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
