发明名称 酸化物焼結体およびそれを加工したタブレット
摘要 <p>The present invention discloses a tablet for ion plating, which is capable of providing high speed film formation of a transparent conductive film suitable for a solar cell, and continuing film formation without generating crack, fracture or splash; and an oxide sintered body for obtaining the same. The oxide sintered body etc. comprising indium oxide as a main component, and tungsten as an additive element, content of tungsten being 0.001 to 0.15, as an atomic ratio of W/ (In + W), characterized in that said oxide sintered body is mainly composed of a crystal grain (A) composed of the indium oxide phase with a bixbyite type structure, where tungsten does not make a solid solution, and a crystal grain (B) composed of the indium oxide phase with a bixbyite type structure, where tungsten does not make a solid solution, and has a density of 3.4 to 5.5 g/cm 3 .</p>
申请公布号 JP5764828(B2) 申请公布日期 2015.08.19
申请号 JP20120555788 申请日期 2012.01.19
申请人 发明人
分类号 C04B35/00;C23C14/08;C23C14/24 主分类号 C04B35/00
代理机构 代理人
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