| 摘要 |
Provided are a method and device that make it possible to perform PVD treatment with uneven target consumption reliably minimized. This PVD treatment method includes the following: performing PVD treatment by producing discharges between a positive electrode (3) and a negative electrode (4) inside a vacuum chamber (2) to vaporize the negative electrode (4); and during the PVD treatment, circulating a cooling medium through a cooling channel formed on either the positive electrode (3) or the negative electrode (4), i.e. the "cooled electrode", thereby cooling the cooled electrode, and reversing the circulation direction of the cooling medium. |
