发明名称 ULTRAVIOLET IRRADIATION APPARATUS
摘要 <p>The present invention relates to an ultraviolet irradiation apparatus which immediately operates without delay at an initial stage by making an initial warming up by irradiating an ultraviolet ray through ultraviolet LEDs. An ultraviolet irradiation apparatus according to the present invention includes a main body which includes an upper plate which is formed in an upper part and has a center opening part formed in the front and back directions; an ultraviolet LED part which is lengthily inserted in to the center opening part, protrudes to the upper part, and irradiates an ultraviolet ray to the upper part; a transfer part which is formed in the main body and moves horizontally a support frame having a semiconductor chip bonded by an attaching film to the upper part of the ultraviolet LED part; a cover part which covers the ultraviolet LED part and the transfer part, has an input extension hoe and a discharge extension hole for inputting the support frame to one side and the other side and discharging it to the outside; and a control part which controls the ultraviolet LED part and the transfer part.</p>
申请公布号 KR20150094449(A) 申请公布日期 2015.08.19
申请号 KR20140015760 申请日期 2014.02.11
申请人 JUN, HEE YOUNG 发明人 JUN, HEE YOUNG
分类号 H01L21/48;H01L21/324;H01L21/677;H01L33/02 主分类号 H01L21/48
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