发明名称 METAL SULFIDE ALLOY FORMING METHOD AND AN ELECTRONIC DEVICE COMPRISING THE METAL SULFIDE ALLOY
摘要 The present invention relates to a method for forming a metal sulfide alloy which includes the steps of: forming a metal oxide alloy on a substrate using an atomic layer deposition (ALD) method; and converting the metal oxide alloy into the metal sulfide alloy. The present invention provides the method for forming the metal sulfide alloy capable of controlling a band gap.
申请公布号 KR101541463(B1) 申请公布日期 2015.08.19
申请号 KR20140109660 申请日期 2014.08.22
申请人 INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY 发明人 KIM, HYUNG JUN;SONG, JEONG GYU;PARK, JU SANG
分类号 H01L21/24;H01L21/205 主分类号 H01L21/24
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