METAL SULFIDE ALLOY FORMING METHOD AND AN ELECTRONIC DEVICE COMPRISING THE METAL SULFIDE ALLOY
摘要
The present invention relates to a method for forming a metal sulfide alloy which includes the steps of: forming a metal oxide alloy on a substrate using an atomic layer deposition (ALD) method; and converting the metal oxide alloy into the metal sulfide alloy. The present invention provides the method for forming the metal sulfide alloy capable of controlling a band gap.
申请公布号
KR101541463(B1)
申请公布日期
2015.08.19
申请号
KR20140109660
申请日期
2014.08.22
申请人
INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY