| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology for easily manufacturing a thin film lithium secondary battery with a compact device under consistent vacuum condition.SOLUTION: A thin-film lithium secondary battery manufacturing device 1 has a substrate transfer mechanism 30 which transfers a substrate 10 by making the substrate pivot on a rotary driving shaft 3 in a vacuum tank 2, and is provided with a preparation taking-out chamber 4, a first to third sputtering chambers 5 to 7, a negative electrode layer forming chamber 8 and a protective layer forming chamber 9 around the rotary driving shaft 3. A collector layer and a protective layer are formed in the first sputtering chamber 5. A positive electrode layer made of LiCoOis formed in the second sputtering chamber 6. A solid electrolyte layer made of LiPON is formed in the third sputtering chamber 7. Opening parts 4a, 5a-7a, 8a and 9a of each chamber are arranged at a position facing a region through which a holding part 32 of the substrate transfer mechanism 30 passes. The opening parts 4a, 5a-7a, 8a and 9a of each chamber are closed by a cover mechanism in a state of mounting the substrate 10. |
