| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To determine whether or not there is a leakage point in a workpiece in a short time and with high accuracy. <P>SOLUTION: Inspection gas is introduced to a hollow chamber 24 after gas is exhausted from the hollow chamber 24 of a case member 18 (workpiece) housed in a chamber 16. Gas in a monitor space 69 is agitated under operation of a first fan 94 and a second fan 110 and then sent to a circulating piping 116. When the gas reaches a detector 122, a display value of the detector 122 represents a value according to concentration (amount) of leakage gas. If there is a leakage point in the case member 18, the inspection gas leaked to the chamber 16 is mixed with the gas in the monitor space 69. The mixed gas is partially sent to the detector 122 through the circulating piping 116 and a sampling line 121. Meanwhile, the rest of the mixed gas is returned to the monitor space 69 through the circulating piping 116. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
