发明名称 PATTERN FORMING METHOD, STRUCTURES, INTERDIGITATED ELECTRODE MANUFACTURING METHOD, AND RECHARGEABLE BATTERY
摘要 Provided are a method for forming a pattern where a plurality of patterns of identical or different pattern materials can be formed on a support in a short time, a structural body, a method for producing a comb-shaped electrode, and a secondary cell. The pattern forming method according to the present invention, where n patterns (n‰¥2) are formed on a support, includes forming a first resist layer on the support surface; repeating: forming a guide hole through all resist layers by exposure and development, filling a kth pattern material into the guide hole by a screen printing process, and forming a (k+1)th resist layer on the kth resist layer and the pattern materials, regarding kth (k=1 to n-1) pattern material and resist layer in order of k=1 to n-1; performing guide hole formation and nth pattern material filling similarly, and removing all the resist layers.
申请公布号 EP2894697(A4) 申请公布日期 2015.08.19
申请号 EP20130835967 申请日期 2013.08.28
申请人 TOKYO OHKA KOGYO CO., LTD. 发明人 ISHIKAWA, KAORU;ASAI, TAKAHIRO
分类号 H01M4/13;G03F7/00;G03F7/12;G03F7/40;H01L21/288;H01L21/768;H01M4/02;H01M4/04;H01M4/139;H01M4/70;H01M6/40;H01M10/052;H01M10/0565;H01M10/058 主分类号 H01M4/13
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