发明名称 |
PATTERN FORMING METHOD, STRUCTURES, INTERDIGITATED ELECTRODE MANUFACTURING METHOD, AND RECHARGEABLE BATTERY |
摘要 |
Provided are a method for forming a pattern where a plurality of patterns of identical or different pattern materials can be formed on a support in a short time, a structural body, a method for producing a comb-shaped electrode, and a secondary cell. The pattern forming method according to the present invention, where n patterns (n‰¥2) are formed on a support, includes forming a first resist layer on the support surface; repeating: forming a guide hole through all resist layers by exposure and development, filling a kth pattern material into the guide hole by a screen printing process, and forming a (k+1)th resist layer on the kth resist layer and the pattern materials, regarding kth (k=1 to n-1) pattern material and resist layer in order of k=1 to n-1; performing guide hole formation and nth pattern material filling similarly, and removing all the resist layers. |
申请公布号 |
EP2894697(A4) |
申请公布日期 |
2015.08.19 |
申请号 |
EP20130835967 |
申请日期 |
2013.08.28 |
申请人 |
TOKYO OHKA KOGYO CO., LTD. |
发明人 |
ISHIKAWA, KAORU;ASAI, TAKAHIRO |
分类号 |
H01M4/13;G03F7/00;G03F7/12;G03F7/40;H01L21/288;H01L21/768;H01M4/02;H01M4/04;H01M4/139;H01M4/70;H01M6/40;H01M10/052;H01M10/0565;H01M10/058 |
主分类号 |
H01M4/13 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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