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发明名称
GROUP III NITRIDE COMPOSITE SUBSTRATE, MANUFACTURING METHOD THEREFOR, AND GROUP III NITRIDE SEMICONDUCTOR DEVICE MANUFACTURING METHOD
摘要
Provided are a group III nitride composite substrate having a low sheet resistance and produced with a high yield, and a method for manufacturing the same, as well as a method for manufacturing a group III nitride semiconductor device using the group III nitride composite substrate. A group III nitride composite substrate (1) includes a group III nitride film (13) and a support substrate (11) formed from a material different in chemical composition from the group III nitride film (13). The group III nitride film (13) is joined to the support substrate (11) in one of a direct manner and an indirect manner. The group III nitride film (13) has a thickness of 10 µm or more. A sheet resistance of a group III-nitride-film (13)-side main surface (13m) is 200 ©/sq or less. A method for manufacturing the group III nitride composite substrate (1) includes the steps of: bonding the group III nitride film (13) and the support substrate (11) to each other in one of a direct manner and an indirect manner; and reducing the thickness of at least one of the group III nitride film (13) and the support substrate bonded to each other.
申请公布号
EP2908330(A1)
申请公布日期
2015.08.19
申请号
EP20130845267
申请日期
2013.09.04
申请人
SUMITOMO ELECTRIC INDUSTRIES, LTD.
发明人
ISHIBASHI, KEIJI;HACHIGO, AKIHIRO;HIROMURA, YUKI;MATSUMOTO, NAOKI;NAKAHATA, SEIJI;NAKANISHI, FUMITAKE;YANAGISAWA, TAKUYA;UEMATSU, KOJI;SEKI, YUKI;YAMAMOTO, YOSHIYUKI;YOSHIZUMI, YUSUKE;MIKAMI, HIDENORI
分类号
H01L21/02;H01L21/762;H01L33/00
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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