发明名称 |
Package systems and manufacturing methods thereof |
摘要 |
A method of forming a package system includes providing a first substrate having a metallic pad and at least one metallic guard ring. The method further includes bonding the metallic pad of the first substrate with a semiconductor pad of a second substrate, wherein the at least one metallic guard ring is configured to at least partially interact with the semiconductor pad to form at least a first portion of an electrical bonding material between the first and second substrates. |
申请公布号 |
US9112001(B2) |
申请公布日期 |
2015.08.18 |
申请号 |
US201414173406 |
申请日期 |
2014.02.05 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
Shu Chia-Pao;Cheng Chun-wen;Chang Kuei-Sung;Huang Hsin-Ting;Tsai Shang-Ying;Peng Jung-Huei |
分类号 |
H01L21/30;H01L21/768;B81C1/00;H01L23/00;H01L25/065 |
主分类号 |
H01L21/30 |
代理机构 |
Lowe Hauptman & Ham, LLP |
代理人 |
Lowe Hauptman & Ham, LLP |
主权项 |
1. A method of forming a package system, the method comprising:
providing a first substrate having a metallic pad and at least one metallic guard ring, wherein the metallic pad protrudes above a top surface of the first substrate; and bonding the metallic pad of the first substrate with a semiconductor pad of a second substrate, wherein the at least one metallic guard ring is configured to at least partially interact with the semiconductor pad to form at least a first portion of an electrical bonding material between the first and second substrates. |
地址 |
TW |