发明名称 Package systems and manufacturing methods thereof
摘要 A method of forming a package system includes providing a first substrate having a metallic pad and at least one metallic guard ring. The method further includes bonding the metallic pad of the first substrate with a semiconductor pad of a second substrate, wherein the at least one metallic guard ring is configured to at least partially interact with the semiconductor pad to form at least a first portion of an electrical bonding material between the first and second substrates.
申请公布号 US9112001(B2) 申请公布日期 2015.08.18
申请号 US201414173406 申请日期 2014.02.05
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 Shu Chia-Pao;Cheng Chun-wen;Chang Kuei-Sung;Huang Hsin-Ting;Tsai Shang-Ying;Peng Jung-Huei
分类号 H01L21/30;H01L21/768;B81C1/00;H01L23/00;H01L25/065 主分类号 H01L21/30
代理机构 Lowe Hauptman & Ham, LLP 代理人 Lowe Hauptman & Ham, LLP
主权项 1. A method of forming a package system, the method comprising: providing a first substrate having a metallic pad and at least one metallic guard ring, wherein the metallic pad protrudes above a top surface of the first substrate; and bonding the metallic pad of the first substrate with a semiconductor pad of a second substrate, wherein the at least one metallic guard ring is configured to at least partially interact with the semiconductor pad to form at least a first portion of an electrical bonding material between the first and second substrates.
地址 TW