发明名称 |
Thin film capacitor |
摘要 |
A thin film capacitor includes a lower electrode layer, a dielectric layer that is provided on said lower electrode layer, and an upper electrode layer that is formed on the dielectric layer. Wherein, the lower electrode layer contains at least a Ni electrode layer, the upper electrode layer configured with at least two layers of a Ni electrode layer and a Cu electrode layer, and the dielectric layer is in contact with both the Ni electrode layer of the lower electrode layer and the Ni electrode layer of the upper electrode layer. |
申请公布号 |
US9111681(B2) |
申请公布日期 |
2015.08.18 |
申请号 |
US201313923585 |
申请日期 |
2013.06.21 |
申请人 |
TDK Corporation |
发明人 |
Saita Hitoshi;Yano Yoshihiko;Oikawa Yasunobu |
分类号 |
H01G4/008;H01G4/01;H01G4/33;H01L49/02 |
主分类号 |
H01G4/008 |
代理机构 |
Posz Law Group, PLC |
代理人 |
Posz Law Group, PLC |
主权项 |
1. A thin film capacitor, comprising:
a lower electrode layer; a dielectric layer that is provided on said lower electrode layer; and an upper electrode layer that is formed on the dielectric layer;wherein
the lower electrode layer contains at least a Ni electrode layer, the upper electrode layer configured with at least two layers of a Ni electrode layer and a Cu electrode layer, and the dielectric layer is in contact with both the Ni electrode layer of the lower electrode layer and the Ni electrode layer of the upper electrode layer. |
地址 |
Tokyo JP |