Light source apparatus and method of controlling the same

摘要

A light source apparatus configured to emit first light and second light includes a wavelength reference device, a splitter, a first detector, a second detector, and a control unit. The control unit includes a correction unit configured to reduce from a detection signal detected by the first detector a portion included in the detected signal and related to an intensity of the second light incident on the first detector from the splitter, and configured to reduce from a detection signal detected by the second detector a portion included in the detected signal and related to an intensity of the first light incident on the second detector from the splitter. The control unit controls a wavelength of the first light and a wavelength of the second light based on signals from the correction unit.

主权项

1. Alight source apparatus configured to emit first light and second light, the light source apparatus comprising:
a wavelength reference device that the first light and the second light are incident on configured to change intensities of the respective beams of light according to a wavelength deviation of the respective beams of light from a first reference wavelength and a wavelength deviation of the respective beams of light from a second reference wavelength; a splitter configured to split light containing the first light and light containing the second light from the wavelength reference device from each other; a first detector configured to detect an intensity of the light containing the first light from the splitter; a second detector configured to detect an intensity of the light containing the second light from the splitter; and a control unit configured to control a wavelength of the first light using a detection signal detected by the first detector, such that the wavelength of the first light is the first reference wavelength, and configured to control a wavelength of the second light using a detection signal detected by the second detector, such that the wavelength of the second light is the second reference wavelength, wherein the control unit includes a correction unit configured to reduce from the detection signal detected by the first detector a portion included in the detected signal and related to the intensity of the second light incident on the first detector from the splitter, and configured to reduce from the detection signal detected by the second detector a portion included in the detected signal and related to the intensity of the first light incident on the second detector from the splitter, and wherein the control unit controls the wavelength of the first light and the wavelength of the second light based on signals from the correction unit.