Method for forming anodized layer, method for producing mold and method for producing antireflective film

摘要

An anodized layer formation method of an embodiment of the present invention includes the step a of providing an aluminum film which is formed on a first principal surface of a support and the step b of anodizing a surface of the aluminum film to form a porous alumina layer which has a plurality of minute recessed portions. In the step a, a second principal surface of the support which is opposite to the first principal surface is provided with a low heat conduction member that has a predetermined pattern. According to an embodiment of the present invention, a porous alumina layer can be formed which includes regions of different minute structures in the predetermined pattern.

主权项

1. An anodized layer formation method, comprising the steps of:
(a) providing an aluminum film which is formed on a first principal surface of a support, a second principal surface of the support which is opposite to the first principal surface being provided with a low heat conduction member that has a predetermined pattern, providing the support which includes a base and an inorganic underlayer formed on a surface of the base, a surface of the inorganic underlayer being the first principal surface, forming an aluminum layer on the inorganic underlayer, forming a natural oxide film on a surface of the aluminum layer, and forming the aluminum film on a surface of the natural oxide film; and (b) anodizing a surface of the aluminum film to form a porous alumina layer that includes a first region and a second region which have a plurality of minute recessed portions, the second region having a pattern formed according to the predetermined pattern and the plurality of minute recessed portions in the second region having structures different from the plurality of minute recessed portions in the first region.