| 摘要 |
<p>A lamp for heat processing apparatus comprises: a power cable which supplies power; a pair of connector members which are connected to the power cable; and a lamp member which is coupled to the connector members to generate heat, wherein the connection member is formed in a T-shape, the lamp member is coupled to an intermediate portion protruding from the connector member, the lamp member is formed overall in an angled C-shape, both end portions thereof are coupled to the pair of connector members, both side portions of the lamp member are bent to protrude outside the connection member. According to the present invention, it is possible to prevent a thermal void from occurring between a lamp and a lamp disposed in a process chamber. In addition, it is possible to prevent various configurations of the connecter member for connecting the lamp to the power cable from being damaged by heat generated from the lamp.</p> |
