发明名称 Projection exposure apparatus with multiple sets of piezoelectric elements moveable in different directions and related method
摘要 The disclosure relates to a projection exposure apparatus and an optical system, such as a projection objective or an illumination system in a projection exposure apparatus for microlithography, that includes at least one optical element and at least one manipulator having a drive device for the optical element. The drive device can have at least one movable partial element and at least one stationary partial element movable relative to one another in at least one direction of movement.
申请公布号 US9110388(B2) 申请公布日期 2015.08.18
申请号 US201213589313 申请日期 2012.08.20
申请人 Carl Zeiss SMT GmbH 发明人 Bleidistel Sascha;Geuppert Bernhard
分类号 G02B7/02;G03F7/20;H01L41/09;H02N2/00;H02N2/02 主分类号 G02B7/02
代理机构 Fish & Richardson P.C. 代理人 Fish & Richardson P.C.
主权项 1. An apparatus, comprising: an illumination device; a projection objective; an optical element; and a manipulator, comprising: a first drive device for the optical element, the first drive device, comprising: a movable element;a stationary element movable relative to the movable element; andpiezoelectric elements between the movable element and the stationary element, the piezoelectric elements comprising a first set of piezoelectric elements, a second set of piezoelectric elements, and a third set of piezoelectric elements, wherein the optical element is in the illumination device or the projection objective, and the apparatus is a projection exposure apparatus, and wherein during use of the manipulator: the first set of piezoelectric elements has a first direction of action;the second set of piezoelectric elements has a second direction of action different from the first direction of action;the third set of piezoelectric elements has a third direction of action different from both the first and second directions of action; andthe manipulator moves the optical element via a step-by-step motion, or the manipulator moves the optical element via an analog motion.
地址 Oberkochen DE