主权项 |
1. An apparatus, comprising:
an illumination device; a projection objective; an optical element; and a manipulator, comprising:
a first drive device for the optical element, the first drive device, comprising:
a movable element;a stationary element movable relative to the movable element; andpiezoelectric elements between the movable element and the stationary element, the piezoelectric elements comprising a first set of piezoelectric elements, a second set of piezoelectric elements, and a third set of piezoelectric elements, wherein the optical element is in the illumination device or the projection objective, and the apparatus is a projection exposure apparatus, and wherein during use of the manipulator:
the first set of piezoelectric elements has a first direction of action;the second set of piezoelectric elements has a second direction of action different from the first direction of action;the third set of piezoelectric elements has a third direction of action different from both the first and second directions of action; andthe manipulator moves the optical element via a step-by-step motion, or the manipulator moves the optical element via an analog motion. |