| 主权项 |
1. A linear motion machine, comprising:
a base having an upper surface configured to support one or more work pieces; and an instrument mounted to the base via a plurality of guideways permitting movement of the instrument relative to the base along three axes, the instrument being configured to measure or manipulate items supported on the base; wherein at least one of the plurality of guideways comprises an elongated guideway member comprising a plurality of elongated generally planar web members, each of the elongated generally planar web members having a length, a width, a thickness, and a pair of opposite side edges running along the length, wherein the length is substantially greater than the width and the width is substantially greater than the thickness for each of the elongated generally planer web members, the plurality of elongated generally planar web members being separately formed and subsequently bonded together at least at one or more of the side edges, one or more of the elongated generally planar web members comprising a ceramic material, wherein the elongated guideway member has a rectangular cross-section including two parallel pairs of parallel planar web members each bonded at opposite side edges to the other pair of parallel planar web members. |
