发明名称 Light-emitting device manufacturing method
摘要 A method for manufacturing a light-emitting device, comprises steps of: providing an as-cut wafer having an irregularly uneven surface comprising surface roughness greater than 0.5 μm; and forming a light-emitting stack on the irregularly uneven surface of the as-cut wafer by an epitaxial growth method, and the light-emitting stack comprises an upper surface having surface roughness less than 0.2 nm; wherein there is no patterning or roughing process after the step of providing the as-cut wafer and before the step of forming the light-emitting stack on the irregularly uneven surface of the as-cut wafer.
申请公布号 US9112101(B2) 申请公布日期 2015.08.18
申请号 US201313870008 申请日期 2013.04.25
申请人 Epistar Corporation 发明人 Guo Yi-Lin;Ou Chen;Lee Chi-Ling;Wang Wei-Han;Shen Hui-Tang;Wu Chi-Hung;Yang Hung-Chih
分类号 H01L33/00;H01L21/76;H01L33/32;H01L33/22;H01L33/12 主分类号 H01L33/00
代理机构 Bacon & Thomas, PLLC 代理人 Bacon & Thomas, PLLC
主权项 1. A method for manufacturing a light-emitting device, comprising steps of: providing an as-cut wafer devoid of a patterning process and having an irregularly uneven surface comprising surface roughness greater than 0.5 μm; and forming a light-emitting stack on the irregularly uneven surface of the as-cut wafer by an epitaxial growth method, and the light-emitting stack comprises an upper surface having surface roughness less than 0.2 nm; wherein there is no patterning or roughing process after the step of providing the as-cut wafer and before the step of forming the light-emitting stack on the irregularly uneven surface of the as-cut wafer.
地址 Hsinchu TW