发明名称 |
Light-emitting device manufacturing method |
摘要 |
A method for manufacturing a light-emitting device, comprises steps of: providing an as-cut wafer having an irregularly uneven surface comprising surface roughness greater than 0.5 μm; and forming a light-emitting stack on the irregularly uneven surface of the as-cut wafer by an epitaxial growth method, and the light-emitting stack comprises an upper surface having surface roughness less than 0.2 nm; wherein there is no patterning or roughing process after the step of providing the as-cut wafer and before the step of forming the light-emitting stack on the irregularly uneven surface of the as-cut wafer. |
申请公布号 |
US9112101(B2) |
申请公布日期 |
2015.08.18 |
申请号 |
US201313870008 |
申请日期 |
2013.04.25 |
申请人 |
Epistar Corporation |
发明人 |
Guo Yi-Lin;Ou Chen;Lee Chi-Ling;Wang Wei-Han;Shen Hui-Tang;Wu Chi-Hung;Yang Hung-Chih |
分类号 |
H01L33/00;H01L21/76;H01L33/32;H01L33/22;H01L33/12 |
主分类号 |
H01L33/00 |
代理机构 |
Bacon & Thomas, PLLC |
代理人 |
Bacon & Thomas, PLLC |
主权项 |
1. A method for manufacturing a light-emitting device, comprising steps of:
providing an as-cut wafer devoid of a patterning process and having an irregularly uneven surface comprising surface roughness greater than 0.5 μm; and forming a light-emitting stack on the irregularly uneven surface of the as-cut wafer by an epitaxial growth method, and the light-emitting stack comprises an upper surface having surface roughness less than 0.2 nm; wherein there is no patterning or roughing process after the step of providing the as-cut wafer and before the step of forming the light-emitting stack on the irregularly uneven surface of the as-cut wafer. |
地址 |
Hsinchu TW |