GAS PURIFICATION FILTER UNIT

摘要

This gas purification filter unit (10) is provided with: a first elimination unit (11) that eliminates gas component impurities among the impurities contained in ozone generated from an ozone generating device; and a second elimination unit (12) that is disposed at a later stage than the first elimination unit and that further eliminates solid particulate impurities from among the impurities from which the gas component has been eliminated. Ozone containing impurities are caused to flow in from the inflow end (10a) of such a gas purification filter unit (10) and is passed through the first elimination unit (11) and second elimination unit (12), and thus ozone from which impurities have been eliminated is discharged from an outflow end (10b).