Resonator, frequency filter, duplexer, electronic device, and method of manufacturing resonator

摘要

A resonator according to the present invention includes a supporting substrate, a piezoelectric layer, a pair of excitation electrodes, and a bonding layer. The piezoelectric layer is made of a piezoelectric material. The pair of excitation electrodes is formed on the upper surface of the piezoelectric layer so as to excite bulk acoustic waves. The bonding layer has a cavity formed therein so as to face the excitation electrode pair through the piezoelectric layer, and the bonding layer bonds the supporting substrate to the lower surface of the piezoelectric layer.

主权项

1. A resonator, comprising:
a supporting substrate; a piezoelectric layer made of a piezoelectric material; a pair of excitation electrodes that is formed on an upper surface of the piezoelectric layer, the pair of excitation electrodes being provided to excite bulk acoustic waves in the piezoelectric layer; and a bonding layer that has a cavity formed therein so as to face the pair of excitation electrodes through the piezoelectric layer, the bonding layer being provided to bond the supporting substrate to a lower surface of the piezoelectric layer, wherein said cavity starts from a top of the bonding layer and does not penetrate through a bottom of the bonding layer.