发明名称 Transfer system
摘要 A transfer system according to an embodiment includes a plurality of robot hands, a storage unit, and an instructing part. The robot hands are operable to hold a thin sheet-like workpiece. The storage unit stores therein speed information that represents a temperature of the workpiece associated with a specified speed of a robot hand that holds the workpiece. The instructing part extracts the specified speed for each robot hand from the speed information and instructs to move all of the robot hands at or lower than a representative speed determined based on a set of extracted specified speed data.
申请公布号 US9111976(B2) 申请公布日期 2015.08.18
申请号 US201213661039 申请日期 2012.10.26
申请人 KABUSHIKI KAISHA YASKAWA DENKI 发明人 Kimura Yoshiki;Minami Takashi
分类号 H01L21/67;H01L21/677;H01L21/687 主分类号 H01L21/67
代理机构 Mori & Ward, LLP 代理人 Mori & Ward, LLP
主权项 1. A transfer system comprising: a robot having an arm, the arm having a distal end; a first robot hand disposed at the distal end of the arm, the first hand having a first plate; a second hand disposed at the distal end of the arm, the second hand having a second plate, the first plate and the second plate each being configured to receive a thin sheet-like workpiece, the first hand and the second hand are rotatably and coaxially disposed on the distal end of the arm, at least one of the first hand and the second hand having a holding mechanism configured to hold a peripheral edge of the workpiece; a storage unit configured to store speed information that defines specified speeds for movement of the first hand and the second hand, the specified speeds being defined based on: presence or absence of a workpiece in the first hand and the second hand, respectively;whether or not the holding mechanism is holding the workpiece present in the first hand and the second hand, respectively; anda temperature of the workpiece present in the first hand and the second hand, respectively; and an instructing part configured to extract the specified speeds for movement of the first hand and the second hand from the speed information using current conditions of the first hand, the second hand, and workpieces thereon, the instructing part is further configured to instruct to move both the first hand and the second hand at or lower than a representative speed determined based on the extracted specified speeds, wherein the instructing part is configured to instruct the holding mechanism to hold the peripheral edge of the workpiece when the workpiece is at normal temperature, and wherein the instructing part is configured to instruct the holding mechanism not to hold the peripheral edge of the workpiece when the workpiece is at an abnormal temperature, and wherein the specified speeds are defined as lower speed amounts when the holding mechanism is not holding the workpiece than when the holding mechanism is holding the workpiece.
地址 Kitakyushu-Shi JP