ELECTROSTATIC CHUCK AND METHOD OF MANUFACTURING THE SAME

摘要

The present invention relates to an electrostatic chuck capable of reducing high temperature treatment during a manufacturing process, and a method to manufacture the same. According to an embodiment of the present invention, the electrostatic chuck is arranged in a substrate processing apparatus on which a substrate is mounted. The electrostatic chuck comprises: an upper dielectric in which an electrode is printed on a lower surface thereof; an insulating coating layer formed on the lower surface of an upper dielectric, insulating the electrode by covering the same; a lower dielectric layer formed by including a dielectric material cured at 400°C or less, of which an upper surface is bonded to the lower surface of the insulating coating layer; and a base body bonded to the lower surface of the lower dielectric layer with a bonding layer as a medium.