| 摘要 |
<p>Provided is a container replacement method capable of preventing degradation of production efficiency of a semiconductor device. The present invention comprises: a buffer (25b) temporarily storing a FOUP (18); and a load port (22) where the FOUP (18) receiving water (W) is connected. In a loader module (15) taking the wafer (W) out of the FOUP (18) connected to the load port (22), one among the untreated FOUP (18) and the treated FOUP (18) is temporarily stored in a buffer (25b) when the treated FOUP (18) and the untreated FOUP (18) are replaced in the load port (22).</p> |
