功能性元件、加速度感测器及开关;FUNCTIONAL DEVICE, ACCELERATION SENSOR, AND SWITCH

摘要

本发明揭示一种功能性元件，其包含：一基板；及一可移动区段，其经结构设计以由该基板固持且可在该基板之一表面中沿一第一方向移动，其中该可移动区段包含具有相对较高刚性之复数个第一轴件部分，该复数个第一轴件部分经并排配置以沿该第一方向延伸且彼此线对称，且经结构设计以制动该可移动区段之突部提供于该等第一轴件部分之实质延伸线上。; and a movable section configured to be held by the substrate and to be movable along a first direction in a surface of the substrate, in which the movable section includes a plurality of first shaft portions with relatively high rigidity, the plurality of first shaft portions are arranged side by side to extend along the first direction and to be line-symmetric to one another, and protrusions configured to brake the movable section are provided on substantially extended lines of the first shaft portions.