| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for producing a carbon nanotube, in which inter-substrate uniformity and intra-substrate uniformity of the lengths of the produced carbon nanotubes can be improved extremely and resultingly mass productivity can be enhanced drastically. ! SOLUTION: A device 1 for producing the carbon nanotube, in which a carbon source-containing gaseous raw material is supplied onto a plurality of substrates X each having a catalyst deposited on the surface thereof so that the carbon nanotube is grown on the substrate X by a chemical vapor deposition method, includes: a cylindrical reaction furnace 2 from one end side of which the gaseous raw material is supplied and from the other end side of which the gas reacted by the chemical vapor deposition method is discharged; and a substrate holder 5 which is mounted in the reaction furnace 2 along the axial direction, has such an engagement mechanism that the substrate holder is engaged with one half side outer edge part of the substrat |
