| 摘要 |
PROBLEM TO BE SOLVED: To provide the characteristic value of an object to be measured from a formed diffraction ring with high accuracy, even when the amount of the object to be measured is minute.SOLUTION: An X-ray incidence angle relative to an object to be measured is adjusted, and a diffraction ring is formed for each of a plurality of incidence angles, and detection is made of its shape. Data based on the shape of the detected diffraction ring is created, and the data is corrected by the corresponding X-ray incidence angle and a preset X-ray incidence angle. The corrected data for each of the plurality of incidence angles are put together as one data group, and the characteristic value of the object to be measured is calculated. |
