METHODS AND APPARATUS FOR VERTICALLY ORIENTING SUBSTRATE PROCESSING TOOLS IN A CLEAN SPACE

摘要

The present invention provides various aspects of support for a fabrication facility capable of routine placement and replacement of processing tools in at least a vertical dimension relative to each other.

主权项

1. A substrate fabricator comprising:
a support structure for fixing in place two or more processing tools into position in at least a vertical dimension relative to each other, wherein at least a portion of a tool port of a first processing tool is in a fabricator cleanspace and at least a portion of a tool body of the first processing tool is external to the fabricator cleanspace; connections comprised within at least a first chassis, wherein the connections made between the first chassis and the first processing tool connect select facility lines to the first processing tool; and robotic automation for transporting substrates between the two or more processing tools.