METHOD FOR FABRICATING MICROSTRUCTURE TO GENERATE SURFACE PLASMON WAVES

摘要

A method for fabricating a microstructure to generate surface plasmon waves comprises steps of: preparing a substrate, and using a carrier material to carry a plurality of metallic nanoparticles and letting the metallic nanoparticles undertake self-assembly to form a microstructure on the substrate, wherein the metallic nanoparticles are separated from each other or partially agglomerated to allow the microstructure to be formed with a discontinuous surface. The present invention fabricates the microstructure having the discontinuous surface by a self-assembly method to generate the surface plasmon waves, thus exempts from using the expensive chemical vapor deposition (CVD) technology and is able to reduce the time and cost of fabrication. The present invention also breaks the structural limitation on generation of surface plasmon waves to enhance the effect of generating the surface plasmon waves.

主权项

1. A method for fabricating a microstructure to generate surface plasmon waves, comprising the steps of:
Step S1: preparing a substrate; and Step S2: using a volatile liquid to carry a plurality of metallic nanoparticles, and letting the metallic nanoparticles undertake self-assembly to form a microstructure on the substrate, wherein the plurality of metallic nanoparticles are separated from each other or partially agglomerated to allow the microstructure to be formed with a discontinuous surface, and wherein the Step S2 further includes the steps of: Step S21: spreading the volatile liquid and the metallic nanoparticles carried by the volatile liquid on the substrate via a spin-coating method, a spraying method, a drip-coating method, or a soaking method; Step S22: letting the metallic nanoparticles move mutually in the volatile liquid to form a plurality of two dimensional hexagonal close packed (2D HCP) structures via self-assembly; and Step S23: undertaking a drying process to gradually volatilize the volatile liquid to make the 2D HCP structures be stacked on another to form a metallic particle stacking layer serving as the discontinuous surface of the microstructure.