Gas Separation

摘要

A device for gas movement in vacuum-coating systems is disclosed that extracts gaseous coating material in the coating chamber that has not been deposited on the substrates to be coated. At least one pump for extracting the coating material is connected to it in an axial extension of the suction device; the suction device has one or more suction openings and is divided up into at least two axial areas whose suction characteristics can be adjusted separately from one another to a great extent.

主权项

1. Device for gas movement in vacuum-coating systems, comprising
at least one coating chamber with at least one coating area, a transport device to transport flat substrates in a direction of transport into the coating chamber and to hold the substrates in it, at least one coating device per coating area that gives off gaseous coating material, wherein the length of the coating device is equal to at least the width of the substrate, at least one suction device per coating area, wherein the suction device
essentially extends in parallel to the coating device and has at least the length of it,at least one connected pump that is suitable for generating a low pressure vis-a-vis the internal pressure of the coating chamber in the interior of the suction device,characterized in that
the at least one pump is connected to the suction device in an axial extension of it, the suction device has one or more suction openings, the suction device has at least two axial areas whose suction characteristics can be adjusted separately from one another to a great extent.