发明名称 |
SEMICONDUCTOR DEVICE AND IMAGING DEVICE |
摘要 |
A semiconductor device according to an embodiment of the present invention is provided with a substrate and a thin-film transistor provided on the substrate. The thin-film transistor comprises: an oxynitride semiconductor layer having a first portion, a second portion spaced apart from the first portion, and a third portion provided between the first portion and the second portion; a first electrically conductive layer electrically connected to the first portion; a second electrically conductive layer electrically connected to the second potion; a gate electrode spaced apart from the third portion; and a first insulation layer provided between the third portion and the gate electrode. The oxynitride semiconductor layer comprises indium, gallium, zinc, and nitrogen. The nitrogen content is 2 at% or less, and the gallium content is greater than the nitrogen content. |
申请公布号 |
WO2015118710(A1) |
申请公布日期 |
2015.08.13 |
申请号 |
WO2014JP72806 |
申请日期 |
2014.08.29 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
NAKANO, SHINTARO;SAITO, NOBUYOSHI;MIURA, KENTARO;MAEDA, YUYA |
分类号 |
H01L21/336;H01L21/28;H01L21/314;H01L21/768;H01L23/522;H01L27/14;H01L29/417;H01L29/423;H01L29/49;H01L29/786 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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