发明名称 SEMICONDUCTOR DEVICE AND IMAGING DEVICE
摘要 A semiconductor device according to an embodiment of the present invention is provided with a substrate and a thin-film transistor provided on the substrate. The thin-film transistor comprises: an oxynitride semiconductor layer having a first portion, a second portion spaced apart from the first portion, and a third portion provided between the first portion and the second portion; a first electrically conductive layer electrically connected to the first portion; a second electrically conductive layer electrically connected to the second potion; a gate electrode spaced apart from the third portion; and a first insulation layer provided between the third portion and the gate electrode. The oxynitride semiconductor layer comprises indium, gallium, zinc, and nitrogen. The nitrogen content is 2 at% or less, and the gallium content is greater than the nitrogen content.
申请公布号 WO2015118710(A1) 申请公布日期 2015.08.13
申请号 WO2014JP72806 申请日期 2014.08.29
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 NAKANO, SHINTARO;SAITO, NOBUYOSHI;MIURA, KENTARO;MAEDA, YUYA
分类号 H01L21/336;H01L21/28;H01L21/314;H01L21/768;H01L23/522;H01L27/14;H01L29/417;H01L29/423;H01L29/49;H01L29/786 主分类号 H01L21/336
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