| 摘要 |
PROBLEM TO BE SOLVED: To provide a small size displacement sensor superior in measurement accuracy. ! SOLUTION: A displacement sensor 1 includes: a first yoke 10 formed of a toric soft magnetic material; a second yoke 20 formed of a toric soft magnetic material, which has an inner peripheral surface 21 facing the outer peripheral surface 11 of the first yoke 10 via a space 60, and which is disposed coaxially with the first yoke 10; a magnet 30 which is magnetized along a shaft direction of the first yoke 10, and which is movably disposed along the shaft direction of the first yoke 10 in a central area in a diameter direction; and a detection element 40 which is disposed in the space 60 so that the detection direction of the magnetic flux density extends along the diameter direction for detecting magnetic flux density generated in the space 60. ! COPYRIGHT: (C)2015,JPO&INPIT |
