Multi-Surface Optical 3D Microscope

摘要

A method of detecting multi-surfaces of an object includes providing an imaging system capable of detecting surfaces of the object. After system parameters are set up, two-dimensional images of the object at multiple Z steps can be acquired. Each surface of the object can then be extracted using two steps. In a first step, the surface can be constructed based on a confidence threshold. In a second step, the surface can be enhanced using an interpolation filter.

主权项

1. A method of measuring multiple surfaces of an object, the method comprising:
selecting a plurality of cross-sectional profiles of surfaces of the object for simultaneous display using a single x-y plot; correcting at least one of the plurality of cross-sectional profiles; calculating parameters of the object; and displaying the plurality of cross-sectional profiles as well as results of the correcting and the calculating.