| 摘要 |
PROBLEM TO BE SOLVED: To inspect a semiconductor device with high accuracy.SOLUTION: A semiconductor device inspection device 1 comprises: a laser source 2; a tester 22 for applying a test signal; a photosensor 10 for outputting a detection signal; a spectrum analyzer 13 for measuring first phase information; a reference signal generation unit 26 for generating a reference signal; a spectrum analyzer 14 for measuring second phase information that is the phase information of the reference signal; and an analysis unit 33 for deriving the phase information of the detection signal at a prescribed frequency on the basis of the first phase information and the second phase information. The spectrum analyzer 13 measures the first phase information relative to a reference frequency, and the spectrum analyzer 14 measures the second phase information relative to a reference frequency, the frequency and phase of the reference signal of the spectrum analyzer 13 and the frequency and phase of the reference signal of the spectrum analyzer 14 being synchronized with each other. |
