PHYSICAL QUANTITY DETECTION SENSOR MODULE AND PHYSICAL QUANTITY DETECTION SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a physical quantity detection sensor module and a physical quantity detection system with which it is possible to expand the scope of application by widening the sensitive width of a sensor as the one to detect a physical quantity. ! SOLUTION: A physical quantity detection system 100 includes a sensor module 200 and a host device 300. The sensor module 200 includes, on a piezoelectric substrate 201 for generating a surface acoustic wave, a surface acoustic wave conversion IDT 210 and a surface acoustic wave reflection IDT 220. The surface acoustic wave conversion IDT 210 converts a high-frequency electric signal and a surface acoustic wave from one to the other. The surface acoustic wave reflection IDT 220, having a parallel capacitor 250 connected in parallel to a humidity sensor 240, reflects the surface acoustic wave in accordance with the impedance of the humidity sensor 240. The parallel capacitor 250 is set to such an electrostatic capacitance that the amplitude value