发明名称 |
RESIN COMPOSITION CONTAINING POLYIMIDE PRECURSOR, METHOD FOR MANUFACTURING CURED FILM, AND ELECTRONIC COMPONENT |
摘要 |
A resin composition containing (a) a polyimide precursor having a structural unit expressed in formula (1) shown below, and (b) a photopolymerizing compound having an ethylenically unsaturated group and an isocyanuric ring structure. In formula (1), R1 is a tetravalent organic group, and R2 is a divalent organic group. R3 and R4 are each independently hydrogen atoms, C1-20 alkyl groups, C3-20 cycloalkyl groups, or monovalent organic groups having an unsaturated carbon-carbon double bond. |
申请公布号 |
WO2015118836(A1) |
申请公布日期 |
2015.08.13 |
申请号 |
WO2015JP00357 |
申请日期 |
2015.01.28 |
申请人 |
HITACHI CHEMICAL DUPONT MICROSYSTEMS, LTD. |
发明人 |
ONO, KEISHI;ENOMOTO, TETSUYA;OHE, MASAYUKI;SUZUKI, KEIKO;SOEJIMA, KAZUYA;SUZUKI, ETSUHARU |
分类号 |
G03F7/027;G03F7/031;H01L21/027 |
主分类号 |
G03F7/027 |
代理机构 |
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代理人 |
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地址 |
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