发明名称 RESIN COMPOSITION CONTAINING POLYIMIDE PRECURSOR, METHOD FOR MANUFACTURING CURED FILM, AND ELECTRONIC COMPONENT
摘要 A resin composition containing (a) a polyimide precursor having a structural unit expressed in formula (1) shown below, and (b) a photopolymerizing compound having an ethylenically unsaturated group and an isocyanuric ring structure. In formula (1), R1 is a tetravalent organic group, and R2 is a divalent organic group. R3 and R4 are each independently hydrogen atoms, C1-20 alkyl groups, C3-20 cycloalkyl groups, or monovalent organic groups having an unsaturated carbon-carbon double bond.
申请公布号 WO2015118836(A1) 申请公布日期 2015.08.13
申请号 WO2015JP00357 申请日期 2015.01.28
申请人 HITACHI CHEMICAL DUPONT MICROSYSTEMS, LTD. 发明人 ONO, KEISHI;ENOMOTO, TETSUYA;OHE, MASAYUKI;SUZUKI, KEIKO;SOEJIMA, KAZUYA;SUZUKI, ETSUHARU
分类号 G03F7/027;G03F7/031;H01L21/027 主分类号 G03F7/027
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