发明名称 EUV OPTICAL ELEMENT HAVING BLISTER-RESISTANT MULTILAYER CAP
摘要 A multilayer mirror having a cap with a multilayer structure including a top layer and a series of bilayers each having an absorber layer and a spacer layer, where the materials for the top layer, absorber layers, and spacer layers are chosen to resist blistering.
申请公布号 WO2015117887(A1) 申请公布日期 2015.08.13
申请号 WO2015EP51809 申请日期 2015.01.29
申请人 ASML NETHERLANDS B.V. 发明人 BOWERING, NORBERT
分类号 G02B5/08;G21K1/06 主分类号 G02B5/08
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