GENERATING DEVICE FOR GENERATING PLASMA IN TUBE-SHAPED BODY

摘要

　The present invention provides a plasma-generating device able to perform DLC deposition by a batch process on an inner surface of tube-shaped bodies having various diameters and aspect ratios, and able to perform DLC deposition on the inner surface of a long circular tube without being affected by the length of the tube-shaped body having a circular tube shape or the like. The generating device for generating plasma in a tube-shaped body is characterized in being provided with: a tube-shaped body; a metal electrode inserted in an inner space portion of the tube-shaped body; a raw material insertion hole for inserting raw material into the inner space portion of the tube-shaped body; and a nanopulse power source for applying a pulse voltage, the tube-shaped body forming a cathode, and the metal electrode forming the anode.