| 摘要 |
The purpose of the present invention is to automatically detect the horizontal position of a substrate transfer device for transferring a substrate. The height dimension of a subject being detected (3), which blocks optical axis F of an optical sensor (5), is measured by lifting or lowering the optical sensor (5) transmitting light, which is arranged on a first transfer arm (2) of a substrate transfer device, with respect to the subject being detected (3) forming a shape of two conic bodies with bottom surfaces connected to each other. The height dimension of the subject being detected (3) is measured by orienting a fork (20) in a first direction and a second direction, and horizontal distance from the position of an inclination part (33), of which the height dimension has been measured, to reference position N of the subject being detected (3) is grasped in each direction. The equations of two straight lines passing reference position N and having different slopes are obtained and an intersection point between the straight lines is obtained as the coordinate position of reference position N. The horizontal position of the first transfer arm (2) can be detected automatically as the coordinate position of reference position N is grasped using a coordinate system being managed as the driveline of the first transfer arm (2). |
