PROBLEM TO BE SOLVED: To exchange a substrate on a substrate stage quickly.SOLUTION: A substrate stage 20a carries a substrate Pfrom a substrate holder 30a in a manner that a pressure gas is jetted from the substrate holder 30a to float the substrate Pand the substrate Pis moved along a horizontal plane using a top surface (substrate mount surface) of the substrate holder 30a as a guide plate with the use of a substrate carry-out device 70a housed in the substrate holder 30a. Thus, the carry-out operation of the substrate Pcan be started after the exposure process on the substrate Pends and before the substrate stage 20a is positioned at a substrate exchange position for the exchange of the substrate P. During the carry-out operation of the substrate P, another substrate Pwhich is subjected to the exposure next, stands by above the substrate holder 30a. After the end of the carry-out operation of the substrate P, the substrate Pis conveyed to a plurality of substrate lift devices 46a of the substrate stage 20a.
