发明名称 |
Semiconductor Device with Post-Passivation Interconnect Structure and Method of Forming the Same |
摘要 |
A semiconductor device, including a protective layer overlying a contact pad and a dummy pad on a semiconductor substrate, an interconnect structure overlying the protective layer and contacting part of the dummy pad through a contact via passing through the protective layer, a bump overlying the interconnect structure positioned over the dummy pad. |
申请公布号 |
US2015228598(A1) |
申请公布日期 |
2015.08.13 |
申请号 |
US201514691424 |
申请日期 |
2015.04.20 |
申请人 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
发明人 |
Chen Hsien-Wei;Yu Tsung-Yuan;Tsai Hao-Yi;Lii Mirng-Ji;Yu Chen-Hua |
分类号 |
H01L23/00;H01L23/532;H01L23/498 |
主分类号 |
H01L23/00 |
代理机构 |
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代理人 |
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主权项 |
1. A method of forming a semiconductor device, comprising:
forming a contact pad over a semiconductor substrate; forming a dummy pad over a semiconductor substrate, spaced apart from the contact pad; forming a polymer layer overlying the contact pad, the dummy pad and the semiconductor substrate; forming a first opening in the polymer layer, exposing a portion of the contact pad; forming a second opening in the polymer layer, exposing a portion of the dummy pad; forming a conductive layer overlying the polymer layer and contacting the exposed portions of the contact pad and the dummy pad through the first opening and the second opening; and forming a bump on the conductive layer, positioned over the dummy pad. |
地址 |
Hsin-Chu TW |