发明名称 Semiconductor Device with Post-Passivation Interconnect Structure and Method of Forming the Same
摘要 A semiconductor device, including a protective layer overlying a contact pad and a dummy pad on a semiconductor substrate, an interconnect structure overlying the protective layer and contacting part of the dummy pad through a contact via passing through the protective layer, a bump overlying the interconnect structure positioned over the dummy pad.
申请公布号 US2015228598(A1) 申请公布日期 2015.08.13
申请号 US201514691424 申请日期 2015.04.20
申请人 Taiwan Semiconductor Manufacturing Company, Ltd. 发明人 Chen Hsien-Wei;Yu Tsung-Yuan;Tsai Hao-Yi;Lii Mirng-Ji;Yu Chen-Hua
分类号 H01L23/00;H01L23/532;H01L23/498 主分类号 H01L23/00
代理机构 代理人
主权项 1. A method of forming a semiconductor device, comprising: forming a contact pad over a semiconductor substrate; forming a dummy pad over a semiconductor substrate, spaced apart from the contact pad; forming a polymer layer overlying the contact pad, the dummy pad and the semiconductor substrate; forming a first opening in the polymer layer, exposing a portion of the contact pad; forming a second opening in the polymer layer, exposing a portion of the dummy pad; forming a conductive layer overlying the polymer layer and contacting the exposed portions of the contact pad and the dummy pad through the first opening and the second opening; and forming a bump on the conductive layer, positioned over the dummy pad.
地址 Hsin-Chu TW