Multi Fluid Cooling System for Large Temperature Range Chuck

摘要

An electrostatic clamping system has an electrostatic chuck having one or more electrodes and a clamping surface and one or more fluid passages therethrough. A plurality of fluid sources has a respective plurality of fluids associated therewith, wherein each of the plurality of fluids are chemically distinct from one another and has a respective viable fluid temperature range associated therewith. A thermal unit is configured to heat and/or cool the plurality of fluids to one or more predetermined temperature setpoints. A valve assembly is configured to selectively fluidly couple each of the plurality of fluid sources to the one or more fluid passages of the electrostatic chuck. A controller is also configured to selectively fluidly couple the one or more fluid passages of the electrostatic chuck with a selected one or more of the plurality of fluid sources via a control of the valve assembly.

主权项

1. An electrostatic clamping system, comprising:
an electrostatic chuck having one or more electrodes and a clamping surface, wherein the electrostatic chuck is configured to support and electrostatically clamp a workpiece thereto via an electrical current passed through the one or more electrodes, and wherein the electrostatic chuck comprises one or more fluid passages therethrough; a plurality of fluid sources having a respective plurality of fluids associated therewith, wherein each of the plurality of fluids are chemically distinct from one another and has a respective viable fluid temperature range associated therewith; a thermal unit configured to heat and/or cool the plurality of fluids to one or more predetermined temperature setpoints; a valve assembly configured to selectively fluidly couple each of the plurality of fluid sources to the one or more fluid passages of the electrostatic chuck; and a controller configured to selectively fluidly couple the one or more fluid passages of the electrostatic chuck with a selected one or more of the plurality of fluid sources via a control of the valve assembly.