| 发明名称 |
METHOD FOR MANUFACTURING ADHESIVE FILM FOR IMPRINTS AND METHOD FOR FORMING PATTERNS |
| 摘要 |
To obtain a good pattern having a good profile of etched pattern. A method for manufacturing an adhesive film for imprints, the method comprising applying an adhesive composition for imprints in a base, and then rinsing the adhesive composition for imprints. |
| 申请公布号 |
US2015228498(A1) |
申请公布日期 |
2015.08.13 |
| 申请号 |
US201514696535 |
申请日期 |
2015.04.27 |
| 申请人 |
FUJIFILM CORPORATION |
发明人 |
HATTORI Akiko;OOMATSU Tadashi;KITAGAWA Hirotaka;ENOMOTO Yuichiro |
| 分类号 |
H01L21/308;C09J133/14;C09J7/02 |
主分类号 |
H01L21/308 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for manufacturing an adhesive film for imprints, the method comprising applying an adhesive composition for imprints in a base, and then rinsing the adhesive composition for imprints;
wherein the adhesive composition for imprints contains a polymerizable compound having a molecular weight of at most 1,000. |
| 地址 |
Tokyo JP |
