发明名称 |
ELECTROSTATIC CHUCK AND METHOD OF MAKING SAME |
摘要 |
An electrostatic chuck includes a ceramic structural element, at least one electrode disposed on the ceramic structural element, and a surface dielectric layer disposed over the at least one electrode, the surface layer activated by a voltage in the electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck. The surface dielectric layer comprises: (i) an insulator layer of amorphous alumina, of a thickness of less than about 5 microns, disposed over the at least one electrode; and (ii) a stack of dielectric layers disposed over the insulator layer. The stack of dielectric layers includes: (a) at least one dielectric layer including aluminum oxynitride; and (b) at least one dielectric layer including at least one of silicon oxide and silicon oxynitride. |
申请公布号 |
WO2015120265(A1) |
申请公布日期 |
2015.08.13 |
申请号 |
WO2015US14810 |
申请日期 |
2015.02.06 |
申请人 |
ENTEGRIS, INC. |
发明人 |
COOKE, RICHARD, A.;NEFF, WOLFRAM;WALDFRIED, CARLO;RYBCZYNSKI, JAKUB;HANAGAN, MICHAEL;KRULL, WADE |
分类号 |
H01L21/683;H02N13/00 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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